Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2000/08/25 Vol. E83-CNo. 8pp. 1311-1316 Type of Manuscript: INVITED PAPER (Special Issue on 1999 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'99)) Category: Circuit Applications Keyword: statistical interconnect library generation, interconnect modeling, Monte Carlo method, process variation,