J. Robert REID


Surface Micromachined Micro-Opto-Electro-Mechanical Systems
Victor M. BRIGHT John H. COMTOIS J. Robert REID Darren E. SENE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2  pp. 206-213
Type of Manuscript:  INVITED PAPER (Special Issue on Micromachine Technology)
Category: 
Keyword: 
MEMSmicromachiningmicromirrormicro-opticsmicro actuator
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