Hiroyuki OGATA


Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate
Hiroyuki OGATA Kenji ICHIJO Kenji KONDO Akito HARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2013/02/01
Vol. E96-C  No. 2  pp. 285-288
Type of Manuscript:  BRIEF PAPER
Category: Semiconductor Materials and Devices
Keyword: 
poly-SiTFTdouble-gateglass substrate
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