Hiroshi TANABE

Excimer-Laser-Induced Zone-Melting-Recrystallization of Silicon Thin Films on Large Glass Substrates and Its Application to TFTs
Hiromichi TAKAOKA Yoshinobu SATOU Takaomi SUZUKI Takuya SASAKI Hiroshi TANABE Hiroshi HAYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/11/01
Vol. E85-C  No. 11  pp. 1860-1865
Type of Manuscript:  Special Section PAPER (Special Issue on Electronic Displays)
Category: Active Matrix Displays
excimer lasercrystallizationpoly-Sigrainlateral growthTFT
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