Hideo MIURA


Mechanical Stress Simulation for Highly Reliable Deep-Submicron Devices
Hideo MIURA Shuji IKEDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/06/25
Vol. E82-C  No. 6  pp. 830-838
Type of Manuscript:  INVITED PAPER (Special Issue on TCAD for Semiconductor Industries)
Category: 
Keyword: 
semiconductortransistorresidual stressstress analysisstress measurement
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