Hao LEI


High-Rate Oblique Deposition of SiO2 Films Using Two Sputtering Sources
Yoichi HOSHI Kensuke YAGI Eisuke SUZUKI Hao LEI Akira SAKAI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10  pp. 1644-1648
Type of Manuscript:  Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
Category: 
Keyword: 
oblique depositionSiO2 filmreactive sputteringhigh-rate depositionalignment layer
 Summary | Full Text:PDF(688.9KB)

Investigation of Low-Damage Sputter-Deposition of ITO Films on Organic Emission Layer
Hao LEI Keisuke ICHIKAWA Meihan WANG Yoichi HOSHI Takayuki UCHIDA Yutaka SAWADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10  pp. 1658-1662
Type of Manuscript:  Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
Category: 
Keyword: 
facing-target sputteringindium tin oxidelow damageorganic layershieldγ-electrons
 Summary | Full Text:PDF(606.2KB)