IEICE Trans

Fumio MIZUNO

High-Resolution Wafer Inspection Using the "in-lens SEM" Fumio MIZUNO Satoru YAMADA Tadashi OHTAKA Nobuo TSUMAKI Toshifumi KOIKE
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1996/03/25 Vol. E79-C No. 3 pp. 317-323 Type of Manuscript: Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology) Category: Particle/Defect Control and Analysis Keyword: semiconductor devices, wafer inspection, scanning electron microscope, objective lens, eucentric stage, acoustic motor, spatial resolution, line-width measurement, BEASTLI,
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Effects of 50 to 200-keV Electrons by BEASTLI Method on Semiconductor Devices Fumio MIZUNO Satoru YAMADA Tsunao ONO
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1996/03/25 Vol. E79-C No. 3 pp. 392-397 Type of Manuscript: Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology) Category: Device Issues Keyword: semiconductor devices, wafer inspection, scanning electron microscope, high-energy electron beam, device damage, surface charging, BEASTLI,
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Development and Fabrication of Digital Neural Network WSIs Minoru FUJITA Yasushi KOBAYASHI Kenji SHIOZAWA Takahiko TAKAHASHI Fumio MIZUNO Hajime HAYAKAWA Makoto KATO Shigeki MORI Tetsuro KASE Minoru YAMADA
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1993/07/25 Vol. E76-C No. 7 pp. 1182-1190 Type of Manuscript: Special Section PAPER (Special Issue on New Architecture LSIs) Category: Neural Networks and Chips Keyword: neural network, WSI, CMOS, electron-beam direct-writing,
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Precise Linewidth Measurement Using a Scanning Electron Probe Fumio MIZUNO Satoru YAMADA Akihiro MIURA Kenji TAKAMOTO Tadashi OHTAKA
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1993/04/25 Vol. E76-C No. 4 pp. 600-606 Type of Manuscript: Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies) Category: Process Technology Keyword: LSI, metrology system, scanning electron probe, measurement accuracy, reproducibility, linearity, repeatability,
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