Fumio MIZUNO


High-Resolution Wafer Inspection Using the "in-lens SEM"
Fumio MIZUNO Satoru YAMADA Tadashi OHTAKA Nobuo TSUMAKI Toshifumi KOIKE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3  pp. 317-323
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Particle/Defect Control and Analysis
Keyword: 
semiconductor deviceswafer inspectionscanning electron microscopeobjective lenseucentric stageacoustic motorspatial resolutionline-width measurementBEASTLI
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Effects of 50 to 200-keV Electrons by BEASTLI Method on Semiconductor Devices
Fumio MIZUNO Satoru YAMADA Tsunao ONO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3  pp. 392-397
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Device Issues
Keyword: 
semiconductor deviceswafer inspectionscanning electron microscopehigh-energy electron beamdevice damagesurface chargingBEASTLI
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Development and Fabrication of Digital Neural Network WSIs
Minoru FUJITA Yasushi KOBAYASHI Kenji SHIOZAWA Takahiko TAKAHASHI Fumio MIZUNO Hajime HAYAKAWA Makoto KATO Shigeki MORI Tetsuro KASE Minoru YAMADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/07/25
Vol. E76-C  No. 7  pp. 1182-1190
Type of Manuscript:  Special Section PAPER (Special Issue on New Architecture LSIs)
Category: Neural Networks and Chips
Keyword: 
neural networkWSICMOSelectron-beam direct-writing
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Precise Linewidth Measurement Using a Scanning Electron Probe
Fumio MIZUNO Satoru YAMADA Akihiro MIURA Kenji TAKAMOTO Tadashi OHTAKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C  No. 4  pp. 600-606
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
LSImetrology systemscanning electron probemeasurement accuracyreproducibilitylinearityrepeatability
 Summary | Full Text:PDF