Fumihiko UESUGI


Synchrotron Radiation Induced Direct Projection Patterning of Aluminum on Si and SiO2 Surfaces
Fumihiko UESUGI Iwao NISHIYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/01/25
Vol. E76-C  No. 1  pp. 47-54
Type of Manuscript:  Special Section PAPER (Special Issue on Opto-Electronics and LSI)
Category: Opto-Electronics Technology for LSIs
Keyword: 
synchrotron radiationsurface modificationaluminumchemical vapor depositionreaction controlgrowth suppressiongrowth initiationchemical shift
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