Fumihiko SATO


7-Mask Self-Aligned SiGe Base Bipolar Transistors with fT of 80 GHz
Tsutomu TASHIRO Takasuke HASHIMOTO Fumihiko SATO Yoshihiro HAYASHI Toru TATSUMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/05/25
Vol. E80-C  No. 5  pp. 707-713
Type of Manuscript:  PAPER
Category: Integrated Electronics
Keyword: 
bipolar transistorsilicon-germanium baseselective epitaxial growthCMPtrench isolationfT
 Summary | Full Text:PDF

Capacitive Pressure Sensor with Center Clamped Diaphragm
Toshihiko OMI Kenji HORIBATA Fumihiko SATO Masashi TAKEUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2  pp. 263-268
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Sensor
Keyword: 
capacitancepressure sensorlinearitydiaphragmmicromachining
 Summary | Full Text:PDF