David HARRISON


Characterisation of Offset Lithographic Films Using Microelectronic Test Structures
Anthony J. WALTON J. Tom M. STEVENSON Leslie I. HAWORTH Martin FALLON Peter S. A. EVANS Blue J. RAMSEY David HARRISON 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/04/25
Vol. E82-C  No. 4  pp. 576-581
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: 
Keyword: 
microelectronicstest structureoffset lithographylinewidth
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