Atsushi NOYA


Thermal Stability of W2N Compound Barrier in W/W2N/poly-Si Gate Electrode Configuration
Atsushi NOYA Mayumi B. TAKEYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/11/01
Vol. E86-C  No. 11  pp. 2332-2335
Type of Manuscript:  LETTER
Category: Electronic Materials
Keyword: 
metallizationMOSgate electrodeWNx
 Summary | Full Text:PDF(184.3KB)

Thermal Stability of ZrN Barrier in W/ZrN/poly-Si Gate Electrode Configuration
Atsushi NOYA Mayumi B. TAKEYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/05/01
Vol. E84-C  No. 5  pp. 704-706
Type of Manuscript:  LETTER
Category: Electronic Materials
Keyword: 
metallizationMOSgate electrodeZrN
 Summary | Full Text:PDF(5.3MB)

A Study on the Oxidation State of Bi-layered Anodized Films
Tsuyoshi DOBASHI Toshiji UMEZAWA Katsutaka SASAKI Atsushi NOYA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1991/10/25
Vol. E74-C  No. 10  pp. 3357-3359
Type of Manuscript:  LETTER
Category: Materials
Keyword: 
 Summary | Full Text:PDF(184.3KB)

An Auger Electron Spectroscopy Study on the Anodization Process of High-Quality Thin-Film Capacitors Made of Hafnium
Atsushi NOYA Katsutaka SASAKI Toshiji UMEZAWA 
Publication:   IEICE TRANSACTIONS (1976-1990)
Publication Date: 1989/12/25
Vol. E72-E  No. 12  pp. 1453-1458
Type of Manuscript:  PAPER
Category: Materials
Keyword: 
 Summary | Full Text:PDF(548.5KB)

Superconducting Y-Ba-Cu Oxide Films as-Grown by RF Diode Sputtering
Mikihiro WATANABE Atsushi MATACHI Teruo ISHIBASHI Atsushi NOYA Shinya KURIKI 
Publication:   IEICE TRANSACTIONS (1976-1990)
Publication Date: 1988/04/25
Vol. E71-E  No. 4  pp. 283-285
Type of Manuscript:  Special Section LETTER (Special Issue: Papers from 1988 Spring Convention IEICE)
Category: Superconductivity Electronics
Keyword: 
 Summary | Full Text:PDF(205.9KB)

An AES Study on the Anodization of Al/Mo/Al Multilayer Films
Atsushi NOYA Katsutaka SASAKI Toshiji UMEZAWA Tsuyoshi DOBASHI 
Publication:   IEICE TRANSACTIONS (1976-1990)
Publication Date: 1988/04/25
Vol. E71-E  No. 4  pp. 266-267
Type of Manuscript:  Special Section LETTER (Special Issue: Papers from 1988 Spring Convention IEICE)
Category: Components and Materials
Keyword: 
 Summary | Full Text:PDF(147KB)

Dielectric Breakdown in Thin Anodized Y2O3 Films
Atsushi NOYA Hiromasa NAKAGAWA Shinya KURIKI Goro MATSUMOTO 
Publication:   IEICE TRANSACTIONS (1976-1990)
Publication Date: 1981/04/25
Vol. E64-E  No. 4  pp. 252-257
Type of Manuscript:  PAPER
Category: Materials
Keyword: 
 Summary | Full Text:PDF(566.1KB)