Anthony J. WALTON


Characterisation of Offset Lithographic Films Using Microelectronic Test Structures
Anthony J. WALTON J. Tom M. STEVENSON Leslie I. HAWORTH Martin FALLON Peter S. A. EVANS Blue J. RAMSEY David HARRISON 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/04/25
Vol. E82-C  No. 4  pp. 576-581
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: 
Keyword: 
microelectronicstest structureoffset lithographylinewidth
 Summary | Full Text:PDF(780.7KB)

The Application of DOE and RSM Techniques for Wafer Mapping in IC Technology
Anthony J. WALTON Martin FALLON David WILSON 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2  pp. 219-225
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: Statistical Analysis
Keyword: 
DOERSMwafer mappingtest structuresintegrated circuits
 Summary | Full Text:PDF(511.3KB)