Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C
No. 4
pp. 600-606
Type of Manuscript:
Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies)
Category: Process Technology
Keyword:
LSI, metrology system, scanning electron probe, measurement accuracy, reproducibility, linearity, repeatability, |