Akihiko ISHITANI


A High Capacitive Coupling Ratio (HiCR) Cell for Single 3 Volt Power Supply Flash Memories
Kohji KANAMORI Yosiaki S. HISAMUNE Taishi KUBOTA Yoshiyuki SUZUKI Masaru TSUKIJI Eiji HASEGAWA Akihiko ISHITANI Takeshi OKAZAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/08/25
Vol. E77-C  No. 8  pp. 1296-1302
Type of Manuscript:  Special Section PAPER (Special Section on High Speed and High Density Multi Functional LSI Memories)
Category: Non-volatile Memory
Keyword: 
F-N tunnelingflash memoryoxynitridelow power supply
 Summary | Full Text:PDF

Highly Reliable Ultra-Thin Tantalum Oxide Capacitors for ULSI DRAMs
Satoshi KAMIYAMA Hiroshi SUZUKI Pierre-Yves LESAICHERRE Akihiko ISHITANI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3  pp. 379-384
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
tantalum oxiderapid thermal nitridation (RTN)SiO2 equivalent thicknessleakage currenttime dependent dielectric breakdown (TDDB)
 Summary | Full Text:PDF

Trends in Capacitor Dielectrics for DRAMs
Akihiko ISHITANI Pierre-Yves LESAICHERRE Satoshi KAMIYAMA Koichi ANDO Hirohito WATANABE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/11/25
Vol. E76-C  No. 11  pp. 1564-1581
Type of Manuscript:  INVITED PAPER (Special Issue on LSI Memories)
Category: 
Keyword: 
capacitordielectricsSi3N4Ta2O5high permittivity materials256 Mbit1 GbitDRAM
 Summary | Full Text:PDF

Copper Adsorption Behavior on Silicon Substrates
Yoshimi SHIRAMIZU Makoto MORITA Akihiko ISHITANI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/04/25
Vol. E76-C  No. 4  pp. 635-640
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-Half Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
metallic impurityadsorption behaviorsilicon substratecharge transfer reactionion complex
 Summary | Full Text:PDF