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Vol/No/Title/Authors number Price(including tax)
Vol.E101-C No.5
Room-Temperature Atomic Layer Deposition of SnO2 Using Tetramethyltin and Its Application to TFT Fabrication
Kentaro TOKORO, Shunsuke SAITO, Kensaku KANOMATA, Masanori MIURA, Bashir AHMMAD, Shigeru KUBOTA, Fumihiko HIROSE,
1 ¥3240
Total: ¥3,240