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Technology Modeling for Emerging SOI Devices
IEICE TRANSACTIONS on Electronics Vol.E86-C No.3 pp.301-307
Publication Date: 2003/03/01
Print ISSN: 0916-8516
Type of Manuscript: INVITED PAPER (Special Issue on the 2002 IEEE International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'02))
Full Text: PDF(488.7KB)
New physical models, algorithms, and parameters are needed to accurately model emerging silicon-on-insulator (SOI) devices. The modeling approaches for various emerging SOI technologies are discussed in this paper.