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Hiroyuki FUJITA Hiroshi TOSHIYOSHI
IEICE TRANSACTIONS on Electronics
Publication Date: 2000/09/25
Print ISSN: 0916-8516
Type of Manuscript: INVITED PAPER (Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)
MEMS, micro electro machanical systems, optical switch, scanner, tunable filter, integrated optics,
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Recently the applications of MEMS (micro electro mechanical systems) have made remarkable progress in many filelds. The optical application of MEMS is one of the most promising because it provides micro mechano optical devices, the key components for high-perfromance systems in optical communication networks and data storage devices. This paper disucces the impacts of MEMS techologies on optical systems. Furthermore, state-of-the-art exmaples of micro optical switches, pig-tailed tunable filters and two-dimensional MEMS optical scanners are described.