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SrBi2Ta2O9 Thin Films Fabricated by Sol-Gel Method with IrO2 Electrodes
Yukihisa OKADA Ichiro KOIWA Kinya ASHIKAGA Katsuaki KAIFU
IEICE TRANSACTIONS on Electronics
Publication Date: 1998/04/25
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on Advanced Memory Devices Using High-Dielectric-Constant and Ferroelectric Thin Films)
SrBi2Ta2O9, IrO2 electrodes, metal-alkoxides, sol-gel, mix, complex, hydrolysis, closely packed structure,
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We prepared alkoxide solutions to fabricate SrBi2Ta2O9 (SBT) ferroelectric capacitors with IrO2 electrodes. In this process, to minimize excess bismuth, the Sr : Bi : Ta mole ratio was kept at 0. 9 : 2. 1 : 2. 0, i. e. , nearly stoichiometric. Three types of solution - mixed-only (MIX), complexed (COMP), and hydrolyzed (HYD) - were used. The HYD capacitor had low absolute leakage current, 10-7 A/cm2 order, and good saturation properties to 6 V. When voltage was applied to each capacitor at 2 to 6 V, MIX and COMP capacitors showed only partial hysteresis loops due to a high leakage current, reflecting the I-V characteristics. These results are probably due to film density caused by metaloxane network bonding. A fatigue endurance test was conducted using cycling of polarization switching at 6 V using the HYD capacitor with IrO2 electrodes. Slight changes were, however, observed in hysteresis loop configuration, but good hysteresis properties were kept up to 1. 04 1012 cycles. We compared SBT ferroelectric thin films fabricated with Pt electrodes and with IrO2 electrodes. Scarcely any difference due to SBT in the XRD pattern was seen, depending on the substrate material. We found that the use of IrO2 electrodes had the effect of decreasing the crystallization temperature. On Pt and IrO2 electrodes, the two films have surface morphology quite different from that of the rod-like structure wellknown for SBT films prepared using a metal 2-ethylhexanate solution. Their surfaces show a similar morphology with relatively large, closely packed grains. A comparison of the I-V characteristics after reannealing showed that the capacitor with IrO2 electrodes had a higher leakage current than that with Pt electrodes. The leakage current was probably due to the density of the film and interface between the SBT film and electrodes.