Novel MMIC Transmission Lines Using Thin Dielectric Layers

Seiichi BANBA  Takao HASEGAWA  Hiroyo OGAWA  Tsuneo TOKUMITSU 

Publication
IEICE TRANSACTIONS on Electronics  Vol.E75-C  No.6  pp.713-720
Publication Date: 1992/06/20
Online ISSN: 
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Issue on MMIC Technology)
Category: 
Keyword: 
MMIC,  transmission line,  multilayer, 

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Summary: 
Novel transmission line structures for multilayer MMICs, which are constructed with thin dielectric layers on a GaAs wafer surface, are theoretically and experimentally investigated. Five thin film transmission line structures are discussed in this paper: (1) Microstrip lines, (2) Inverted microstrip lines, (3) Triplate lines, (4) Trapezoidal microstrip lines and (5) Valley microstrip lines. These transmission line structures are fabricated using thin polyimide films and chemical etching.