Fabrication of Integrated PTFE-Filled Waveguide Butler Matrix for Short Millimeter-Wave by SR Direct Etching

Mitsuyoshi KISHIHARA  Masaya TAKEUCHI  Akinobu YAMAGUCHI  Yuichi UTSUMI  Isao OHTA  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E101-C   No.6   pp.416-422
Publication Date: 2018/06/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E101.C.416
Type of Manuscript: PAPER
Category: Microwaves, Millimeter-Waves
Keyword: 
microstructure,  X-ray lithography,  dielectric loaded waveguides,  Butler matrix,  millimeter wave circuits,  

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Summary: 
The microfabrication technique based on SR (Synchrotron Radiation) direct etching process has recently been applied to construct PTFE microstructures. This paper attempts to fabricate an integrated PTFE-filled waveguide Butler matrix for short millimeter-wave by SR direct etching. First, a cruciform 3-dB directional coupler and an intersection circuit (0-dB coupler) are designed at 180 GHz. Then, a 4×4 Butler matrix with horn antennas is designed and fabricated. Finally, the measured radiation patterns of the Butler matrix are shown.