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Electro-Optic Modulator Based on Photolithography Fabricated p-i-n Integrated Photonic Crystal Nanocavity
Nurul Ashikin Binti DAUD Yuta OOKA Tomohisa TABATA Tomohiro TETSUMOTO Takasumi TANABE
IEICE TRANSACTIONS on Electronics
Publication Date: 2017/08/01
Online ISSN: 1745-1353
Type of Manuscript: PAPER
photonic crystal, electro-optic devices, integrated optics, modulators, nanophotonics, opto-electronics,
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We present the first demonstration of an electro-optic modulator based on a photolithographically fabricated photonic crystal (PhC) nanocavity with a p-i-n junction with SiO2 cladding. We show that the device exhibits an ultrahigh quality factor (Q∼105) and allow us to demonstrate electro-optic modulation through the integrated p-i-n diode structure. We demonstrate an electro-optic modulation based on the carrier injection.