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Si-Based Photonic Crystals and Photonic-Bandgap Waveguides
Masaya NOTOMI Akihiko SHINYA Eiichi KURAMOCHI Itaru YOKOHAMA Chiharu TAKAHASHI Koji YAMADA Jun-ichi TAKAHASHI Takayuki KAWASHIMA Shojiro KAWAKAMI
IEICE TRANSACTIONS on Electronics
Publication Date: 2002/04/01
Print ISSN: 0916-8516
Type of Manuscript: INVITED PAPER (Special Issue on Recent Progress of Integrated Photonic Devices)
Category: New Devices
photonic crystal, photonic band gap, waveguide, photonic IC, Si photonics,
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We studied various types of 2D and 3D Si-based photonic crystal structures that are promising for future photonic integrated circuit application. With regard to 2D SOI photonic crystal slabs, we confirmed the formation of a wide photonic bandgap at optical communication wavelengths, and used structural tuning to realize efficient single-mode line-defect waveguides operating within the bandgap. As regards 3D photonic crystals, we used a combination of lithography and the autocloning deposition method to realize complicated 3D structures. We used this strategy to fabricate 3D full-gap photonic crystals and 3D/2D hybrid photonic crystals.