Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2009/12/01 Vol. E92-CNo. 12pp. 1438-1442 Type of Manuscript: Special Section PAPER (Special Section on Nanomaterials and Nanodevices for Nanoscience and Nanotechnology) Category: Nanomaterials and Nanostructures Keyword: sputtering,
mesh electrode,
zinc oxide,
plasma annealing,