Keyword : wet etching


DC and RF Performance of AlN/GaN MOS-HEMTs
Sanna TAKING Douglas MACFARLANE Ali Z. KHOKHAR Amir M. DABIRAN Edward WASIGE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2011/05/01
Vol. E94-C  No. 5 ; pp. 835-841
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
AlN/GaNHEMTMOS-HEMTAl2O3wet etchingthermal oxidationsmall-signal model
 Summary | Full Text:PDF(1.9MB)

A Proposal of TC-MOSFET and Fabrication Process of Twin Si Channels
Shun-ichiro OHMI Tetsushi SAKAI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/05/01
Vol. E90-C  No. 5 ; pp. 994-999
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: Novel MOSFET Structures
Keyword: 
twin-channelself-alignSOIΩ-gateSiNwet etching
 Summary | Full Text:PDF(1.6MB)