Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2008/07/01
Vol. E91-C
No. 7
pp. 1009-1014
Type of Manuscript: Special Section PAPER (Special Section on Heterostructure Microelectronics with TWHM 2007)
Category: GaN Process Technology
Keyword:
AlGaN/GaN HEMTs,
thermal CVD SiN,
current collapse,
passivation film,
gate insulator,
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