Keyword : tantalum oxide

Observation of Blue-Light Emission from Tantalum Oxide Films Deposited by Radio-Frequency Magnetron Sputtering
Kenta MIURA  Hiroki MIYAZAKI  Osamu HANAIZUMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10  pp. 1669-1672
Type of Manuscript: Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
Category: 
Keyword: 
tantalum oxide,  sputtering,  annealing,  blue-light emission, 
  Summary |  Full Text:PDF
Highly Reliable Ultra-Thin Tantalum Oxide Capacitors for ULSI DRAMs
Satoshi KAMIYAMA  Hiroshi SUZUKI  Pierre-Yves LESAICHERRE  Akihiko ISHITANI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/20
Vol. E77-C  No. 3  pp. 379-384
Type of Manuscript: Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Device Technology
Keyword: 
tantalum oxide,  rapid thermal nitridation (RTN),  SiO2 equivalent thickness,  leakage current,  time dependent dielectric breakdown (TDDB), 
  Summary |  Full Text:PDF