Keyword : reactive ion etching

Color Filter Based on Surface Plasmon Resonance Utilizing Sub-Micron Periodic Hole Array in Aluminum Thin Film
Naoki IKEDA  Yoshimasa SUGIMOTO  Masayuki OCHIAI  Daijyu TSUYA  Yasuo KOIDE  Daisuke INOUE  Atsushi MIURA  Tsuyoshi NOMURA  Hisayoshi FUJIKAWA  Kazuo SATO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/02/01
Vol. E95-C  No. 2  pp. 251-254
Type of Manuscript: BRIEF PAPER
Category: 
Keyword: 
surface plasmon resonance,  aluminum,  color filter,  electron beam lithography,  reactive ion etching, 
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High Resolution Long Array Thermal Ink Jet Printhead with On-Chip LSI Heater Plate and Micromachined Si Channel Plate
Michiaki MURATA  Masaki KATAOKA  Regan NAYVE  Atsushi FUKUGAWA  Yoshihisa UEDA  Tohru MIHARA  Masahiko FUJII  Toshimichi IWAMORI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/12/01
Vol. E84-C  No. 12  pp. 1792-1800
Type of Manuscript: Special Section PAPER (Special Issue on Integrated Systems with New Concepts)
Category: 
Keyword: 
thermal ink jet,  micromachining,  drop ejector,  reactive ion etching,  electrostatic bonding, 
  Summary |  Full Text:PDF