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Keyword : poly-Si
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Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate Hiroyuki OGATA
Kenji ICHIJO
Kenji KONDO
Akito HARA
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Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2013/02/01
Vol. E96-C
No. 2
pp. 285-288
Type of Manuscript: BRIEF PAPER
Category: Semiconductor Materials and Devices Keyword: poly-Si,
TFT,
double-gate,
glass substrate,
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