Keyword : poly-Si


Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate
Hiroyuki OGATA  Kenji ICHIJO  Kenji KONDO  Akito HARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2013/02/01
Vol. E96-C  No. 2  pp. 285-288
Type of Manuscript: BRIEF PAPER
Category: Semiconductor Materials and Devices
Keyword: 
poly-SiTFTdouble-gateglass substrate
  Summary |  Full Text:PDF (517.7KB)

Effects of Electric Field on Metal-Induced Lateral Crystallization under Limited Ni-Supply Condition
Gou NAKAGAWA  Noritoshi SHIBATA  Tanemasa ASANO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2005/04/01
Vol. E88-C  No. 4  pp. 662-666
Type of Manuscript: Special Section PAPER (Special Section on Fundamental and Application of Advanced Semiconductor Devices)
Category: Thin Film Transistors
Keyword: 
poly-SiTFTmetal-induced lateral crystallizationneedle-like SiNi-silicideelectric field
  Summary |  Full Text:PDF (961.3KB)

Low Temperature Poly-Si Thin Film Transistor on Plastic Substrates
Jang Yeon KWON  Do Young KIM  Hans S. CHO  Kyung Bae PARK  Ji Sim JUNG  Jong Man KIM  Young Soo PARK  Takashi NOGUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2005/04/01
Vol. E88-C  No. 4  pp. 667-671
Type of Manuscript: Special Section PAPER (Special Section on Fundamental and Application of Advanced Semiconductor Devices)
Category: Thin Film Transistors
Keyword: 
poly-SiTFTplastic substrate
  Summary |  Full Text:PDF (620.9KB)

Low-Temperature Gate Insulator for Poly-Si Thin Film Transistors by Combination of Photo-Oxidation and Plasma Enhanced Chemical Vapor Deposition Using Tetraethylorthosilicate and O2 Gases
Yukihiko NAKATA  Tetsuya OKAMOTO  Toshimasa HAMADA  Takashi ITOGA  Yutaka ISHII 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/11/01
Vol. E85-C  No. 11  pp. 1849-1853
Type of Manuscript: Special Section PAPER (Special Issue on Electronic Displays)
Category: Active Matrix Displays
Keyword: 
oxidationpoly-SiTFTgate insulatorSiO2
  Summary |  Full Text:PDF (668.1KB)

Excimer-Laser-Induced Zone-Melting-Recrystallization of Silicon Thin Films on Large Glass Substrates and Its Application to TFTs
Hiromichi TAKAOKA  Yoshinobu SATOU  Takaomi SUZUKI  Takuya SASAKI  Hiroshi TANABE  Hiroshi HAYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/11/01
Vol. E85-C  No. 11  pp. 1860-1865
Type of Manuscript: Special Section PAPER (Special Issue on Electronic Displays)
Category: Active Matrix Displays
Keyword: 
excimer lasercrystallizationpoly-Sigrainlateral growthTFT
  Summary |  Full Text:PDF (2.4MB)