Keyword : oxygen-ion implantation

High-Performance Small-Scale Collector-Up AlGaAs/GaAs HBT's with a Carbon-Doped Base Fabricated Using Oxygen-Ion Implantation
Shoji YAMAHATA  Yutaka MATSUOKA  Tadao ISHIBASHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/09/20
Vol. E77-C  No. 9  pp. 1437-1443
Type of Manuscript: Special Section PAPER (Special Issue on Heterostructure Devices and Epitaxial Growth Techniques)
Category: 
Keyword: 
heterojunction bipolar transistor,  collector-up structure,  carbon-doped base,  oxygen-ion implantation,  maximum oscillation frequency, 
  Summary |  Full Text:PDF (549KB)
Fabrication of Small AlGaAs/GaAs HBT's for lntegrated Circuits Using New Bridged Base Electrode Technology
Takumi NITTONO  Koichi NAGATA  Yoshiki YAMAUCHI  Takashi MAKIMURA  Hiroshi ITO  Osaake NAKAJIMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/09/20
Vol. E77-C  No. 9  pp. 1455-1463
Type of Manuscript: PAPER
Category: Semiconductor Materials and Devices
Keyword: 
heterojunction bipolar transistor,  self-aligned structure,  oxygen-ion implantation,  zinc diffusion,  carbon doping, 
  Summary |  Full Text:PDF (911.2KB)