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Keyword : nanotechnology
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Carbon Nanotube Technologies for LSI via Interconnects Yuji AWANO
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Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2006/11/01
Vol. E89-C
No. 11
pp. 1499-1503
Type of Manuscript: Special Section PAPER (Special Section on Novel Device Architectures and System Integration Technologies)
Category: INVITED Keyword: carbon nanotube,
interconnect,
CVD,
nanotechnology,
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