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Keyword : micromachining

An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography Zhen MA David M. KLYMYSHYN Sven ACHENBACH Martin BORNER Nina DAMBROWSKY Jurgen MOHR
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2007/12/01 Vol. E90-C No. 12 pp. 2192-2197 Type of Manuscript: Special Section PAPER (Special Section on Recent Technologies for Microwave and Millimeter-wave Passive Devices) Category: Keyword: cavity resonators, micromachining, RF MEMS, X-ray lithography, high Q,
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RF MEMS--Enabling Technology for Millimeter-Waves Youngwoo KWON Sanghyo LEE
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2006/07/01 Vol. E89-C No. 7 pp. 898-905 Type of Manuscript: Special Section PAPER (Special Section on Heterostructure Microelectronics with TWHM2005) Category: INVITED Keyword: MEMS, millimeter-wave, micromachining, passive device,
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Basic Studies of Fiber-Optic MEMS for Telecommunication Using Three Dimensional Micromachining Kazuhiro HANE Minoru SASAKI JongHyeong SONG Yohei TAGUCHI Kosuke MIURA
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2001/12/01 Vol. E84-C No. 12 pp. 1785-1791 Type of Manuscript: Special Section PAPER (Special Issue on Integrated Systems with New Concepts) Category: Keyword: optical communication system, micro-electro-mechanical systems, micromachining, optical fiber components, tunable optical devices,
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High Resolution Long Array Thermal Ink Jet Printhead with On-Chip LSI Heater Plate and Micromachined Si Channel Plate Michiaki MURATA Masaki KATAOKA Regan NAYVE Atsushi FUKUGAWA Yoshihisa UEDA Tohru MIHARA Masahiko FUJII Toshimichi IWAMORI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2001/12/01 Vol. E84-C No. 12 pp. 1792-1800 Type of Manuscript: Special Section PAPER (Special Issue on Integrated Systems with New Concepts) Category: Keyword: thermal ink jet, micromachining, drop ejector, reactive ion etching, electrostatic bonding,
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A Compact V-Band Filter/Antenna Integrated Receiver IC Built on Si-Micromachined BCB Suspended Structure Kazuaki TAKAHASHI Ushio SANGAWA Suguru FUJITA Michiaki MATSUO Takeharu URABE Hiroshi OGURA Hiroyuki YABUKI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2001/10/01 Vol. E84-C No. 10 pp. 1506-1514 Type of Manuscript: Special Section PAPER (Special Issue on Millimeter-Wave Circuits and Fabrication Technologies Opening up the 21st Century) Category: Keyword: micromachining, suspended line, benzocyclobutene, filter, antenna,
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Temperature Insensitive Micromachined GaAlAs/GaAs Vertical Cavity Wavelength Filter Takeru AMANO Fumio KOYAMA Nobuhiko NISHIYAMA Akihiro MATSUTANI Kenichi IGA
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2001/05/01 Vol. E84-C No. 5 pp. 678-684 Type of Manuscript: Special Section PAPER (Joint Special Issue on Recent Progress in Optoelectronics and Communications) Category: Optical Passive Devices and Modules Keyword: wavelength tuning, micromachining, semiconductor DBR, wavelength trimming, vertical cavity filter, multiple wavelength,
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Temperature Insensitive Micromachined GaAlAs/GaAs Vertical Cavity Wavelength Filter Takeru AMANO Fumio KOYAMA Nobuhiko NISHIYAMA Akihiro MATSUTANI Kenichi IGA
Publication: IEICE TRANSACTIONS on Communications Publication Date: 2001/05/01 Vol. E84-B No. 5 pp. 1304-1310 Type of Manuscript: Special Section PAPER (Joint Special Issue on Recent Progress in Optoelectronics and Communications) Category: Optical Passive Devices and Modules Keyword: wavelength tuning, micromachining, semiconductor DBR, wavelength trimming, vertical cavity filter, multiple wavelength,
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Design, Process, and Evaluation of a Tunable Optical Fabry-Perrot Filter Using a Silicon Capacitive Pressure Sensor Kenichiro SUZUKI Takefumi OGUMA Tetsuji UEDA Takashi SHIBUYA
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2000/09/20 Vol. E83-C No. 9 pp. 1435-1440 Type of Manuscript: Special Section PAPER (Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations) Category: Keyword: tunable optical filter, Fabry-Perrot, capacitive pressure sensor, boron-doped silicon, micromachining,
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Fabrication of Micro-Pipes and Their Applications to Single-Mode Fiber Switching and Splicing Shinji NAGAOKA
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1997/02/20 Vol. E80-C No. 2 pp. 280-284 Type of Manuscript: Special Section PAPER (Special Issue on Micromachine Technology) Category: Optical Application Keyword: micromachining, optical switch, single-mode fiber, micro-pipe,
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Capacitive Pressure Sensor with Center Clamped Diaphragm Toshihiko OMI Kenji HORIBATA Fumihiko SATO Masashi TAKEUCHI
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1997/02/20 Vol. E80-C No. 2 pp. 263-268 Type of Manuscript: Special Section PAPER (Special Issue on Micromachine Technology) Category: Sensor Keyword: capacitance, pressure sensor, linearity, diaphragm, micromachining,
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Surface Micromachined Micro-Opto-Electro-Mechanical Systems Victor M. BRIGHT John H. COMTOIS J. Robert REID Darren E. SENE
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1997/02/20 Vol. E80-C No. 2 pp. 206-213 Type of Manuscript: INVITED PAPER (Special Issue on Micromachine Technology) Category: Keyword: MEMS, micromachining, micromirror, micro-optics, micro actuator,
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AlGaAs/GaAs Micromachining for Monolithic Integration of Micromechanical Structures with Laser Diodes Yuji UENISHI Hidenao TANAKA Hiroo UKITA
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 1995/02/20 Vol. E78-C No. 2 pp. 139-145 Type of Manuscript: Special Section PAPER (Special Issue on Micromachines and Micro Electro Mechanical Systems) Category: Keyword: micromachining, microstructures, integrated sensors, integrated optics, microelectro mechanical systems, MEMS,
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