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Keyword : gate
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Gate-Extension Overlap Control by Sb Tilt Implantation Kentaro SHIBAHARA
Nobuhide MAEDA
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Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2007/05/01
Vol. E90-C
No. 5
pp. 973-977
Type of Manuscript: Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: Junction Formation and TFT Reliability Keyword: MOSFET,
extension,
gate,
overlap,
tilt implantation,
Sb,
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