|
|
Keyword : Si
|
|
|
|
|
|
|
|
|
|
High-Quality Low-Dose SIMOX Wafers Sadao NAKASHIMA
|
Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1997/03/20
Vol. E80-C
No. 3
pp. 364-369
Type of Manuscript: INVITED PAPER (Special Issue on SOI Devices and Their Process Technologies)
Category: Wafer Technologies Keyword: SOI,
SIMOX,
annealing,
oxidation,
Si,
|
| |
Summary |
Full Text:PDF
(488.2KB)
|
|
|
|
|
|
|
|
|
|