Keyword : Nb/AlOx/Nb Josephson junction


Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation
Shuichi NAGASAWA Kenji HINODE Tetsuro SATOH Mutsuo HIDAKA Hiroyuki AKAIKE Akira FUJIMAKI Nobuyuki YOSHIKAWA Kazuyoshi TAKAGI Naofumi TAKAGI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/03/01
Vol. E97-C  No. 3 ; pp. 132-140
Type of Manuscript:  INVITED PAPER (Special Section on Leading-Edge Technology of Superconductor Large-Scale Integrated Circuits)
Category: 
Keyword: 
superconducting fabrication technologyNb/AlOx/Nb Josephson junctionsingle flux quantumplanarizationshift register
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