Keyword : MEMS


Wavelength Trimming of Micro-Machined VCSELs
Hayato SANO  Norihiko NAKATA  Akihiro MATSUTANI  Fumio KOYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/02/01
Vol. E95-C  No. 2  pp. 237-242
Type of Manuscript: Special Section PAPER (Special Section on Photonic Devices using Nanofabrication Technology and Their Applications)
Category: 
Keyword: 
VCSELMEMSwavelength trimmingWDMoptical Interconnects
  Summary |  Full Text:PDF (2.4MB)

RF CMOS Integrated Circuit: History, Current Status and Future Prospects
Noboru ISHIHARA  Shuhei AMAKAWA  Kazuya MASU 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2011/02/01
Vol. E94-A  No. 2  pp. 556-567
Type of Manuscript: Special Section PAPER (Special Section on Analog Circuit Techniques and Related Topics)
Category: INVITED
Keyword: 
RFCMOStransceiverintegrated circuitMEMSfuture
  Summary |  Full Text:PDF (2MB)

Uncooled Infrared Radiation Focal Plane Array with Low Noise Pixel Driving Circuit
Risako UENO  Hiroto HONDA  Honam KWON  Koichi ISHII  Masako OGATA  Hitoshi YAGI  Ikuo FUJIWARA  Kazuhiro SUZUKI  Keita SASAKI  Hideyuki FUNAKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2010/11/01
Vol. E93-C  No. 11  pp. 1577-1582
Type of Manuscript: Special Section PAPER (Special Section on Electronic Displays)
Category: INVITED
Keyword: 
infraredfocal plane arrayMEMS
  Summary |  Full Text:PDF (1.2MB)

Micromachined RF Devices for Concurrent Integration on Dielectric-Air-Metal Structures
Tamotsu NISHINO  Masatake HANGAI  Yukihisa YOSHIDA  Sang-Seok LEE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2010/07/01
Vol. E93-C  No. 7  pp. 1111-1118
Type of Manuscript: Special Section PAPER (Special Section on Recent Progress in Microwave and Millimeter-Wave Technologies)
Category: 
Keyword: 
micromachineMEMShollow waveguidesGCPWfiltershybridsMEMS switchessilicon
  Summary |  Full Text:PDF (1.9MB)

Tunable CMOS LNA Using a Variable Inductor for a Reconfigurable RF Circuit
Hirotaka SUGAWARA  Kenichi OKADA  Kazuya MASU 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2009/02/01
Vol. E92-A  No. 2  pp. 401-410
Type of Manuscript: Special Section PAPER (Special Section on Analog Circuit Techniques and Related Topics)
Category: 
Keyword: 
reconfigurable RFvariable inductorLNAMEMS
  Summary |  Full Text:PDF (1.5MB)

Electrostatically Actuated Two-Dimensional Optical Scanner Having a High Resonant Frequency Ratio of Fast/Slow Axes
Hiroshi NOGE  Yosuke HAGIHARA  Kiyohiko KAWANO  Hideki UEDA  Takaaki YOSHIHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10  pp. 1611-1615
Type of Manuscript: Special Section PAPER (Special Section on Electronic Displays)
Category: INVITED
Keyword: 
MEMSvertical comb driveoptical scannermicro mirrorlaser display
  Summary |  Full Text:PDF (481.4KB)

A Bisection Method-Based Controlling Scheme for Phased Array Antenna with Slow Switching Speed-Phase Shifters
Quoc Tuan TRAN  Shinsuke HARA  Atsushi HONDA  Yuuta NAKAYA  Ichirou IDA  Yasuyuki OISHI 
Publication:   IEICE TRANSACTIONS on Communications
Publication Date: 2008/05/01
Vol. E91-B  No. 5  pp. 1557-1567
Type of Manuscript: PAPER
Category: Wireless Communication Technologies
Keyword: 
MEMSphase shifterIEEE 802.11abit-sizeone-dimension searchbisection
  Summary |  Full Text:PDF (821.3KB)

A 12 b 200 kS/s 0.52 mA 0.47 mm2 Algorithmic A/D Converter for MEMS Applications
Young-Ju KIM  Hee-Cheol CHOI  Seung-Hoon LEE  Dongil "Dan" CHO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/02/01
Vol. E91-C  No. 2  pp. 206-212
Type of Manuscript: PAPER
Category: Electronic Circuits
Keyword: 
algorithmiclow powerMEMSADCCMOS
  Summary |  Full Text:PDF (591KB)

Sandwich Structure Type RF-MEMS Variable Capacitor with Low Voltage Controllability and Wide Tuning Range
Takuma NISHIMOTO  Kiichi YAMASHITA  Kenichi OHHATA 
Publication:   IEICE TRANSACTIONS on Communications
Publication Date: 2008/02/01
Vol. E91-B  No. 2  pp. 572-574
Type of Manuscript: LETTER
Category: Devices/Circuits for Communications
Keyword: 
MEMSRF-MEMSvariable capacitor
  Summary |  Full Text:PDF (264.6KB)

Logic and Analog Test Schemes for a Single-Chip Pixel-Parallel Fingerprint Identification LSI
Satoshi SHIGEMATSU  Hiroki MORIMURA  Toshishige SHIMAMURA  Takahiro HATANO  Namiko IKEDA  Yukio OKAZAKI  Katsuyuki MACHIDA  Mamoru NAKANISHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/10/01
Vol. E90-C  No. 10  pp. 1892-1899
Type of Manuscript: Special Section PAPER (Special Section on VLSI Technology toward Frontiers of New Market)
Category: Image Sensor/Vision Chip
Keyword: 
testpixel parallelsensorfingerprint identificationsingle chiphigh-functional deviceMEMS
  Summary |  Full Text:PDF (1.2MB)

Microoptomechatronics: An Overview
Kiyoshi ITAO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1  pp. 3-5
Type of Manuscript: REVIEW PAPER
Category: INVITED
Keyword: 
microoptomechatronicsmicromachinenanomechatronicsnanomachineMEMSNEMS
  Summary |  Full Text:PDF (674.4KB)

Photonic Crystal Waveguide Switches with Movable Slabs
Kazuhiro HANE  Ken-ichi UMEMORI  Yoshiaki KANAMORI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1  pp. 51-58
Type of Manuscript: Special Section PAPER (Special Section on Microoptomechatronics)
Category: INVITED
Keyword: 
MEMSoptical switchphotonic crystalmicroactuator
  Summary |  Full Text:PDF (2.8MB)

An Adaptive Beamforming Method for Phased Array Antenna with MEMS Phase Shifters
Quoc Tuan TRAN  Shinsuke HARA  Yuuta NAKAYA  Ichirou IDA  Yasuyuki OISHI 
Publication:   IEICE TRANSACTIONS on Communications
Publication Date: 2006/09/01
Vol. E89-B  No. 9  pp. 2503-2513
Type of Manuscript: PAPER
Category: Wireless Communication Technologies
Keyword: 
MEMSphase shifterIEEE 802.11amono-resolutionmulti-resolutionprocessing delay
  Summary |  Full Text:PDF (1.1MB)

RF MEMS--Enabling Technology for Millimeter-Waves
Youngwoo KWON  Sanghyo LEE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2006/07/01
Vol. E89-C  No. 7  pp. 898-905
Type of Manuscript: Special Section PAPER (Special Section on Heterostructure Microelectronics with TWHM2005)
Category: INVITED
Keyword: 
MEMSmillimeter-wavemicromachiningpassive device
  Summary |  Full Text:PDF (2.7MB)

Fabrication Process of Nonarcing Power MEMS Switch
Yu YONEZAWA  Noboru WAKATSUKI  Yoshio SATOH  Tadashi NAKATANI  Koichiro SAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2005/08/01
Vol. E88-C  No. 8  pp. 1629-1634
Type of Manuscript: Special Section PAPER (Special Section on Recent Development of Electro-Mechanical Devices--Selected Papers from International Session on Electro-Mechanical Devices 2004 (IS-EMD2004)--)
Category: Relays and Switches
Keyword: 
arc dischargeMEMSarc suppressioncontact devicecantilever
  Summary |  Full Text:PDF (1.2MB)

Analysis of Resonant Frequency of Fast Scanning Micromirror with Vertical Combdrives
Hiroyuki WADA  Daesung LEE  Stefan ZAPPE  Olav SOLGAARD 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/11/01
Vol. E87-C  No. 11  pp. 2006-2008
Type of Manuscript: LETTER
Category: Electromechanical Devices and Components
Keyword: 
MEMSmicromachinescanning mirrorvertical combdrivesresonant frequency
  Summary |  Full Text:PDF (158.7KB)

The 3D Measurement and Analysis of High Precision Surfaces Using Con-Focal Optical Methods
John McBRIDE  Christian MAUL 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/08/01
Vol. E87-C  No. 8  pp. 1261-1267
Type of Manuscript: Special Section PAPER (Special Section on IS-EMD2003--Recent Technical Trend of Electro-Mechanical Devices)
Category: INVITED
Keyword: 
3D surface scanningmicro-metrologyMEMScontact erosioncon-focal methods
  Summary |  Full Text:PDF (1.1MB)

Lithography Process for Trench Pattern above Large Cavity to Fabricate Fast Scanning Micromirror
Hiroyuki WADA  Daesung LEE  Stefan ZAPPE  Uma KRISHNAMOORTHY  Olav SOLGAARD 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/08/01
Vol. E87-C  No. 8  pp. 1395-1398
Type of Manuscript: LETTER
Category: Electromechanical Devices and Components
Keyword: 
MEMSmicromachinelithography processscanning mirrorcombdrives
  Summary |  Full Text:PDF (277.7KB)

A Possible Simple Structure for Variable Microwave Inductors and Their Filter Applications
Norio IMAI  Kazuhiko HONJO  Akira SAITOU 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/01/01
Vol. E87-C  No. 1  pp. 113-115
Type of Manuscript: LETTER
Category: Microwaves, Millimeter-Waves
Keyword: 
variable inductorsfilterMEMSvariable bandwidth
  Summary |  Full Text:PDF (433.3KB)

Current Status and Future Prospects of Semiconductor Terahertz Electronics
Hans L. HARTNAGEL  Manuel RODRIGUEZ-GIRONES 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/10/01
Vol. E86-C  No. 10  pp. 1911-1915
Type of Manuscript: INVITED PAPER (Special Issue on Heterostructure Microelectronics with TWHM2003)
Category: 
Keyword: 
terahertz electronicsMEMSSchottky diodesHBV's
  Summary |  Full Text:PDF (1MB)

Parametric Design for Resin Self-Alignment Capability
Jong-Min KIM  Kozo FUJIMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/10/01
Vol. E86-C  No. 10  pp. 2129-2136
Type of Manuscript: PAPER
Category: Electronic Components
Keyword: 
joint geometryMEMSresinself-alignmentsurface tensionOE-MCMs
  Summary |  Full Text:PDF (1.4MB)

System Perspective of Electromechanical Devices Development of the NEMS/MEMS Group at National Taiwan University
Chih-Kung LEE  Wen-Jong WU  Pei-Zen CHANG  Long-Sun HUANG  Shu-Sheng LEE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/06/01
Vol. E86-C  No. 6  pp. 979-987
Type of Manuscript: Special Section PAPER (Special Issue on Recent Development of Electro-Mechanical Devices (IS-EMD 2002))
Category: Emerging Technologies
Keyword: 
MEMSsensorsactuatorsprecision measurementAVIDmorphinscope
  Summary |  Full Text:PDF (1.2MB)

Localization and Dynamic Tracking Using Wireless-Networked Sensors and Multi-Agent Technology: First Steps
Zhidong DENG  Weixiong ZHANG 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2002/11/01
Vol. E85-A  No. 11  pp. 2386-2395
Type of Manuscript: INVITED PAPER (Special Section on Concurrent System Technology and Its Application to Multiple Agent Systems)
Category: 
Keyword: 
localization and mobile object trackingdistributed algorithmmulti-agent systemwireless sensor networkMEMS
  Summary |  Full Text:PDF (951.9KB)

Optical MEMS
Hiroyuki FUJITA  Hiroshi TOSHIYOSHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/09/20
Vol. E83-C  No. 9  pp. 1427-1434
Type of Manuscript: INVITED PAPER (Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)
Category: 
Keyword: 
MEMSmicro electro machanical systemsoptical switchscannertunable filterintegrated optics
  Summary |  Full Text:PDF (2.4MB)

Micromechanical Photonic Integrated Circuits
Ming C. WU  Li FAN  Guo-Dong SU 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/06/20
Vol. E83-C  No. 6  pp. 903-911
Type of Manuscript: INVITED PAPER (Special Issue on Advanced Optical Devices for Next Generation High-Speed Communication Systems and Photonic Networks)
Category: Switches and Novel Devices
Keyword: 
MEMSoptical MEMSMOEMSphotonic integrated circuitsmicro-opticsoptical interconnect
  Summary |  Full Text:PDF (5.9MB)

Structure and Mechanics Study of Slider Design for 5-15 nm Head-Disk Spacing
Gang SHENG  Bo LIU  Wei HUA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/12/20
Vol. E82-C  No. 12  pp. 2125-2131
Type of Manuscript: Special Section PAPER (Special Issue on Information Storage Technologies for the 21st Century)
Category: 
Keyword: 
magnetic recordinghead-disk interfacemechanics and tribologyMEMS
  Summary |  Full Text:PDF (1.4MB)

Microassembly System for Integration of MEMS Using the Surface Activated Bonding Method
Tadatomo SUGA  Yuzo ISHII  Naoe HOSODA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/20
Vol. E80-C  No. 2  pp. 297-302
Type of Manuscript: Special Section PAPER (Special Issue on Micromachine Technology)
Category: Fabrication
Keyword: 
bondingsurface activated bondingassemblymicro-systemintegrationMEMSmicromachineWWW
  Summary |  Full Text:PDF (1.1MB)

Surface Micromachined Micro-Opto-Electro-Mechanical Systems
Victor M. BRIGHT  John H. COMTOIS  J. Robert REID  Darren E. SENE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/20
Vol. E80-C  No. 2  pp. 206-213
Type of Manuscript: INVITED PAPER (Special Issue on Micromachine Technology)
Category: 
Keyword: 
MEMSmicromachiningmicromirrormicro-opticsmicro actuator
  Summary |  Full Text:PDF (888.8KB)

Recent MEMS Research Activities in Japan
Hiroyuki FUJITA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/20
Vol. E80-C  No. 2  pp. 198-205
Type of Manuscript: INVITED PAPER (Special Issue on Micromachine Technology)
Category: 
Keyword: 
MEMSmicromachinesactuatorssensors
  Summary |  Full Text:PDF (628.7KB)

AlGaAs/GaAs Micromachining for Monolithic Integration of Micromechanical Structures with Laser Diodes
Yuji UENISHI  Hidenao TANAKA  Hiroo UKITA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/02/20
Vol. E78-C  No. 2  pp. 139-145
Type of Manuscript: Special Section PAPER (Special Issue on Micromachines and Micro Electro Mechanical Systems)
Category: 
Keyword: 
micromachiningmicrostructuresintegrated sensorsintegrated opticsmicroelectro mechanical systemsMEMS
  Summary |  Full Text:PDF (669.4KB)