Yoji SAITO


Optical and Morphological Properties of Spin-Coated Triple Layer Anti-Reflection Films on Textured Silicon Substrates
Ryosuke WATANABE Takehiro MARIKO Yoji SAITO 
Publication:   
Publication Date: 2018/04/01
Vol. E101-C  No. 4  pp. 299-302
Type of Manuscript:  BRIEF PAPER
Category: Electronic Materials
Keyword: 
anti-reflection coatingsilicon solar cellssol-geltexturing
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Evaluation of Spin-Coated Alumina Passivation Layer for Point-Contacted Rear Electrode Passivation of Silicon Solar Cells
Ryosuke WATANABE Tsubasa KOYAMA Yoji SAITO 
Publication:   
Publication Date: 2017/01/01
Vol. E100-C  No. 1  pp. 101-107
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
silicon solar cellssurface passivationaluminasol-gel
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Alumina Passivation Films Prepared by Wet Process for Silicon Solar Cells Using Aluminum Isopropoxide as a Sol-Gel Precursor
Ryosuke WATANABE Mizuho KAWASHIMA Yoji SAITO 
Publication:   
Publication Date: 2017/01/01
Vol. E100-C  No. 1  pp. 108-111
Type of Manuscript:  BRIEF PAPER
Category: Semiconductor Materials and Devices
Keyword: 
silicon solar cellssurface passivationsol-gel process
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Texturization for Multi-Crystalline Silicon Solar Cells with Chlorine Trifluoride Gas and Acid Solution
Takahiro SANDA Yoji SAITO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2013/02/01
Vol. E96-C  No. 2  pp. 289-291
Type of Manuscript:  BRIEF PAPER
Category: Semiconductor Materials and Devices
Keyword: 
plasamaless etchingtexturingreflectance spectra
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Plasmaless Dry Etching of Silicon Nitride Films with Chlorine Trifluoride Gas
Yoji SAITO Masahiro HIRABARU Akira YOSHIDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/07/25
Vol. E75-C  No. 7  pp. 834-838
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra Clean Technology)
Category: 
Keyword: 
silicon nitride filmplasmaless etchingchlorine trifuoride gasultra-violet light irradiation
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Annealing Effect on the Resistivity of Phosphorus Doped LPCVD Polycrystalline Silicon Films
Yoji SAITO Chinami KAWAMOTO Hiroshi KUWANO 
Publication:   IEICE TRANSACTIONS (1976-1990)
Publication Date: 1986/04/25
Vol. E69-E  No. 4  pp. 235-237
Type of Manuscript:  Special Section LETTER (Special Issue: Papers from 1986 National Convention IECE Japan)
Category: Silicon Devices and Integrated Circuits
Keyword: 
 Summary | Full Text:PDF(198.7KB)