Tetsuro SATOH


Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation
Shuichi NAGASAWA Kenji HINODE Tetsuro SATOH Mutsuo HIDAKA Hiroyuki AKAIKE Akira FUJIMAKI Nobuyuki YOSHIKAWA Kazuyoshi TAKAGI Naofumi TAKAGI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2014/03/01
Vol. E97-C  No. 3  pp. 132-140
Type of Manuscript:  INVITED PAPER (Special Section on Leading-Edge Technology of Superconductor Large-Scale Integrated Circuits)
Category: 
Keyword: 
superconducting fabrication technologyNb/AlOx/Nb Josephson junctionsingle flux quantumplanarizationshift register
 Summary | Full Text:PDF(5.3MB)

Improvements in Fabrication Process for Nb-Based Single Flux Quantum Circuits in Japan
Mutsuo HIDAKA Shuichi NAGASAWA Kenji HINODE Tetsuro SATOH 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/03/01
Vol. E91-C  No. 3  pp. 318-324
Type of Manuscript:  INVITED PAPER (Special Section on Recent Progress in Superconductive Digital Electronics)
Category: 
Keyword: 
superconductive circuitJosephson junctionfabrication processSFQ (Single Flux Quantum) circuitNb/AlOx/Nb junction
 Summary | Full Text:PDF(2.2MB)

Pattern-Size-Free Planarization for Multilayered Large-Scale SFQ Circuits
Kenji HINODE Shuichi NAGASAWA Masao SUGITA Tetsuro SATOH Hiroyuki AKAIKE Yoshihiro KITAGAWA Mutsuo HIDAKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/12/01
Vol. E86-C  No. 12  pp. 2511-2513
Type of Manuscript:  LETTER
Category: Superconductive Electronics
Keyword: 
planarizationreversal maskNb SFQmultilevel wiring
 Summary | Full Text:PDF(496.4KB)

Fabrication Processes for High-Tc Superconducting Integrated Circuits Based on Edge-Type Josephson Junctions
Tetsuro SATOH Mutsuo HIDAKA Shuichi TAHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1998/10/25
Vol. E81-C  No. 10  pp. 1532-1537
Type of Manuscript:  INVITED PAPER (Special Issue on Low- and High-Temperature Superconductive Electron Devices and Their Applications)
Category: High-Tc Junction Technology
Keyword: 
YBa2Cu3OxPrBa2Cu3OxJosephson junctionintegrated circuitgroundplane
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A High-Tc Superconductor Josephson Sampler
Mutsuo HIDAKA Tetsuro SATOH Hirotaka TERAI Shuichi TAHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/10/25
Vol. E80-C  No. 10  pp. 1226-1232
Type of Manuscript:  INVITED PAPER (Special Issue on Basic Properties and Applications of Superconductive Electron Devices)
Category: 
Keyword: 
high-Tc superconductorramp-edge junctionsamplerintegrated circuitgroundplane
 Summary | Full Text:PDF(604.9KB)