Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1992/06/20
Vol. E75-C
No. 6
pp. 698-706
Type of Manuscript: Special Section PAPER (Special Issue on MMIC Technology)
Category:
Keyword:
monolithic,
multilayer,
dielectric film,
TFMS,
size reduction,
layout flexibility,
|
N-Layer Dielectric Film Structure