Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2009/05/01 Vol. E92-CNo. 5pp. 686-690 Type of Manuscript: Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices) Category: Keyword: AlGaN/GaN HEMTs,
current collapse,
SiN,
passivation film,
thermal CVD,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2008/07/01 Vol. E91-CNo. 7pp. 1009-1014 Type of Manuscript: Special Section PAPER (Special Section on Heterostructure Microelectronics with TWHM 2007) Category: GaN Process Technology Keyword: AlGaN/GaN HEMTs,
thermal CVD SiN,
current collapse,
passivation film,
gate insulator,
