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Naoki HARA
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N-InAlAs/InGaAs HEMT DCFL Inverter Fabricated Using Pt-Based Gate and Photochemical Dry Etching Naoki HARADA
Shigeru KURODA
Kohki HIKOSAKA
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Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1992/10/20
Vol. E75-C
No. 10
pp. 1165-1171
Type of Manuscript: Special Section PAPER (Special Issue on Compound Semiconductor Integrated Circuits)
Category: Keyword: HEMT,
InGaAs,
Schottky junction,
DCEL,
dry etching,
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