Motosuke MIYOSHI


A New CD Measurement Method Linked with the Electrical Properties of Devices
Fumio KOMATSU Motosuke MIYOSHI Hiromu FUJIOKA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/07/25
Vol. E82-C  No. 7  pp. 1347-1352
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
CD SEMmetrologycurved structureelectrical propertiesarea and perimeter
 Summary | Full Text:PDF(2MB)

A New Autofocus Using Image Processing Techniques in Critical Dimension Measurement SEM
Fumio KOMATSU Hiroshi MOTOKI Motosuke MIYOSHI 
Publication:   IEICE TRANSACTIONS on Information and Systems
Publication Date: 1998/07/25
Vol. E81-D  No. 7  pp. 738-742
Type of Manuscript:  Special Section PAPER (Special Issue on Test and Diagnosis of VLSI)
Category: Beam Testing/Diagnosis
Keyword: 
autofocusimage processingpattern recognitionZ-sensorCD SEM
 Summary | Full Text:PDF(619.8KB)