Masayoshi ICHIKAWA


Automatic Defect Pattern Detection on LSI Wafers Using Image Processing Techniques
Kazuyuki MARUO Tadashi SHIBATA Takahiro YAMAGUCHI Masayoshi ICHIKAWA Tadahiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/06/25
Vol. E82-C  No. 6  pp. 1003-1012
Type of Manuscript:  PAPER
Category: Integrated Electronics
Keyword: 
defect detectionimage processingimage recognitionHough transformwavelet transform
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