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Kazunori SAITO
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Proximity Effect Correction in EB Lithography Using Pattern Shape Adjustment Techniques Naoshi SUGIYAMA
Kazunori SAITOH
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Publication: IEICE TRANSACTIONS (1976-1990)
Publication Date: 1980/03/20
Vol. E63-E
No. 3
pp. 198-203
Type of Manuscript: PAPER
Category: Integrated Circuits Keyword:
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Full Text:PDF
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