Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2010/05/01
Vol. E93-C
No. 5
pp. 590-595
Type of Manuscript: Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: Flash/Advanced Memory
Keyword:
SONOS,
SOHOS,
flash memory,
high-k,
HfO2,
nonvolatile memory,
Atomic Layer Deposition,
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